EH PEU Gen3 Helium Leak Tester
Product Introduction：
Test Cycle：≤60s/pcs
Helium-filled Pressure：abs IBar∽abs 4Bar
Test Sensitivity：Minimum detected helium leakage rate 1.0E-9mbar.L /s
Detection Method：Vacuum chamber helium mass spectrometry leak detection
Loading and unloading methods:manual mode
Vacuum pressure capacity of empty chamber:20Pa(abs)
Workpiece vacuum pressure capacity:1000Pa (abs)
Device self check function:Vacuum chamber air tightness self-test、System self-test
